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Octafluorocyclobutane

Octafluorocyclobutane is an important etching gas in the plasma etching process of the electronics industry.

                   

Product Description

Chemical Name Octafluorocyclobutane
Synonyms Perfluorocyclobutane, R-C318
CAS # 115-25-3
ELINCS # (EU) 204-075-2
Molecular Formula CC4F8
Structure
Molecular Weight 200.03
ODP（CFC-11 = 1） 0
GWP100（CO2 = 1） 3200
Atmospheric Life Time (Days) 10300

 

Physical & Chemical Properties

Chemical Name Octafluorocyclobutane
Boiling Point(℃) -5.8
Melting Point（℃） -40.1
Liquid Density ( -5.8℃, g/cm³） 1.637
Vapor Density (Air=1) 7.0
Saturated Vapor Pressure（@20℃, bar） 2.7
Critical Temperature（℃） 115.3
Critical Pressure（MPa） 2.79
Solubility in water (mg/L) 140
Flash Point（℃） Not applicable (non-flammable)
Flammability (@21℃) Not applicable (non-flammable)
Explosion Limit（%vol) Not applicable (non-flammable)

Product Specification

Purity 99.9% 99.99%

 

Packing Specification

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