Tetrafluoromethane - Yuji America Corp - Fluorine Chemicals-Yuji America Corp – Fluorine Chemicals  
+1-562-391-9140
Careers Contact Us
Request A Quote
Home Products Tetrafluoromethane
CALL US : +1-562-391-9140

Categories

By Chemical NameRefrigerantsBlowing AgentsAerosol PropellantsFire Extinguishing AgentsSolvents Cleaning AgentsElectronic GasesInsulating GasesImmersion Fluorinated Electronic CoolantLithium Ion Battery ChemicalsWorking FluidFluorinated Pharmaceutical & Pesticide IntermediatesFluorinated Fine Chemicals

Hot Applications

Electronic Solvents

Electronic Solvents
HFO Foam Blowing Agents Dielectric Insulating Gas Precision Cleaning Energy & Battery Refrigeration & Working Fluids

Tetrafluoromethane

Tetrafluoromethane is a colorless, odorless, non-flammable, compressible gas that is insoluble in water. Electronic grade carbon tetrafluoride is currently one of the main plasma etching gases in the semiconductor industry, mainly used for etching silicon, silicon dioxide, silicon nitride, metal silicide and certain metals.

                   

Product Description

Chemical Name Tetrafluoromethane
Synonyms Perfluorocarbons, tetrafluoromethane,

CFC 14, Dragon 14, R-14
CAS # 75-73-0
ELINCS # (EU) 200-896-5
Molecular Formula CF4
Structure CF4
Molecular Weight 88.00
ODP（CFC-11 = 1） 0
GWP100（CO2 = 1） 7390
Atmospheric Life Time (years) 50,000
TWA（8-hr, mg/m³） 2.5

 

Physical & Chemical Properties

Chemical Name Tetrafluoromethane
Boiling Point(℃) -127.8
Melting Point（℃） -183.6
Liquid Density（-127.8℃, g/cm3） 1.603
Vapor Density (Air=1) 0.97
Saturated Vapor Pressure（15℃, MPa） 3.65
Critical Temperature（℃） -45.5
Critical Pressure（bar） 37.43
Critical Volume（dm3/mol） 0.412
Solubility in Water Insoluble
Flash Point（℃） Not applicable (non-flammable)
Flammability（@21℃）  Not applicable (non-flammable)
Explosion Limit（%vol)  Not applicable (non-flammable)

 

Product Specification

Purity 99.9% 99.99%

 

Packing Specification

Order Amount Packing Specification
Sample Contact For More Details
Commercial Contact For More Details
ISO Tank Contact For More Details
Custom Packaging Contact For More Details

 

Products

By Chemical NameRefrigerantsBlowing AgentsAerosol PropellantsFire Extinguishing AgentsSolvents Cleaning AgentsElectronic GasesInsulating GasesImmersion Fluorinated Electronic CoolantLithium Ion Battery ChemicalsWorking FluidFluorinated Pharmaceutical & Pesticide IntermediatesFluorinated Fine Chemicals

About Us

Applications

News

Careers

Contact Us

Call Us

+1-562-391-9140 Request A Quote

Follow Us

© 2022 Copyright by Yuji America Corp. All rights reserved.

Request A Quote

Our business is most valuable when it helps our customers. Please fill out the form with as much detail as possible so we can respond with the most helpful solution.