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1,1,1,2,3,3-Hexafluoropropane (HFC-236ea) is an environmentally friendly and novel dry etching gas, mainly used in front end etching process of semiconductor.
Chemical Name | 1,1,1,2,3,3-Hexafluoropropane |
Synonyms | HFC-236ea |
CAS # | 431-63-0 |
ELINCS # (EU) | 207-076-6 |
Molecular Formula | C3H2F6 |
Structure | CF3CFH2CF2 |
Molecular Weight | 152.04 |
ODP(CFC-11 = 1) | 0 |
GWP100(CO2 = 1) | 1330 |
Life Time (Days) | 11 |
Chemical Name | 1,1,1,2,3,3-Hexafluoropropane |
Boiling Point(℃) | 6.19 |
Critical Temperature(℃) | 139.29 |
Critical Pressure(bar) | 3.5 |
Purity | 99.9% | 99.99% |
Cylinder Size | Valve Type | Filling Weight |
10.2L | CGA 350 / DISS 724 | 10kg |
44L | CGA 350 / DISS 724 | 44kg |
47L | CGA 350 / DISS 724 | 47kg |
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