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1,1,1,2,2,2-Hexafluoroethane

Hexafluoroethane is an important etching gas in the plasma etching process of the electronics industry.

                   

Product Description

Chemical Name 1,1,1,2,2,2-Hexafluoroethane
Synonyms Carbon Hexafluoride, Hexafluoroethane, Perfluoroethane, Halocarbon 116, PFC-116, CFC-116, R-116, Arcton 116, Halon 2600, UN 2193
CAS # 76-16-4
ELINCS # (EU) 200-939-8
Molecular Formula C2F6
Structure C2F6
Molecular Weight 138.01
ODP（CFC-11 = 1） 0
GWP100（CO2 = 1） 12200
Atmospheric Life Time (Years) 10000
TWA（8-hr, mg/m³） 2.5

 

Physical & Chemical Properties

Chemical Name 1,1,1,2,2,2-Hexafluoroethane
Boiling Point(℃) -78.2
Melting Point（℃） -100.6
Liquid Density ( -78.2℃, kg/m3） 1608
Vapor Density (Air=1) 4.823
Saturated Vapor Pressure（psig） 430.3
Critical Temperature（℃） 19.9
Critical Pressure（bar） 30.537
Critical Density (kg/m³) 623.53
Solubility in Water Insoluble
Flash Point（℃） Not applicable (non-flammable)
Flammability (@21℃) Not applicable (non-flammable)
Explosion Limit（%vol) Not applicable (non-flammable)

Product Specification

Purity 99.9% 99.99%

 

Packing Specification

Cylinder Size Valve Type Filling Weight
10.2L CGA 320 / CGA 660/ DISS 716 8kg
44L CGA 320 / CGA 660/ DISS 716 40kg
47L CGA 320 / CGA 660/ DISS 716 45kg

 

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